How Thermo Fisher is Advancing Semiconductor Production

The semiconductor industry has experienced significant challenges and opportunities in recent years, including chip shortages, increased chip demand and the need for advanced metrology tools.

As devices have evolved from 32nm planar structures to 2nm nanosheets, the demand for TEM samples has substantially increased, introducing new challenges for metrology labs.

Intensifying these challenges is the fact the industry is at another demand inflection point, driven by the rise of AI.

"If we look back in time starting 2010, we saw that we had a mobile device inflection point for the semiconductor industry and that led to demand on semiconductor chips," says Abhi Barve, Senior Director of Automated Solutions at Thermo Fisher Scientific, in an interview on its website.

"For faster, high performance chips to support that particular industry application."

Then Abhi explains what followed this - the inflection point of social media - which exponentially increased demand, leading eventually to todays technological landscape.

"In 2025 we have the AI inflection point and that is driving a markedly different demand on the semiconductor chip industry," he says.

"Each of these inflection points essentially drove more complex, smaller, high performance chips, which is leading our customers to need more TEM metrology information to support their R&D and yield RAMP as they go through the processes of bringing that product to market." 

To overcome these challenges, semiconductor manufacturers are turning to advanced automation capabilities available in metrology and yield analysis solutions.

Automation in semiconductor manufacturing can provide significant benefits, including increased productivity and faster learning curves for new or reskilled technical resources.

By integrating advanced automation and AI capabilities, Thermo Fisher is driving semiconductor innovation and advancement, enabling manufacturers to meet the increasing demands of the industry with greater efficiency and precision.

Thermo Fisher: Driving semiconductor innovation

Thermo Fisher Scientific has long been at the forefront of scientific innovation, providing advanced solutions across various industries.

In the realm of semiconductor manufacturing, the company has made significant strides by introducing cutting-edge technologies that enhance productivity, precision and efficiency.

One of their most notable contributions is the development of the Thermo Scientific Vulcan Automated Lab, a ground breaking solution designed to transform semiconductor analysis.

Scaling semiconductor lab productivity

The rapid evolution and miniaturisation of semiconductor technology have led to an unprecedented demand for atomic-scale transmission electron microscopy (TEM) metrology data.

Manufacturers now face the challenge of scaling laboratory operations quickly while maintaining high efficiency and productivity to meet the growing global need for semiconductors that power everything from consumer electronics to autonomous vehicles.

To address these challenges, Thermo Fisher introduced the Vulcan Automated Lab, a seamlessly integrated system designed to enhance productivity, increase yield and reduce operating costs for semiconductor manufacturers.

This innovative solution integrates robotic handling with artificial intelligence-enhanced instruments for semiconductor analysis, enabling consistent and efficient standards for TEM metrology workflows.

By streamlining metrology data collection using a combination of materials handling automation and data connectivity. The Vulcan Automated Lab accelerates the data collection process and creates an integrated workflow between the semiconductor lab and the fabrication facility.

Vulcan Automated Lab instruments for TEM metrology

The Vulcan Automated Lab comprises state-of-the-art instruments designed to maximise lab productivity:

• Helios 6 HXS FIB-SEM:

This instrument provides top-tier automation and accuracy for high-volume semiconductor TEM sample preparation. It features automated navigation, precise positioning for TEM sample preparation, site setup and automated thinning enhanced by machine learning-assisted endpoints.

Additionally, it includes AI training capability for fine-tuning and refining automation models to specific device types.

The Helios 6 HXS FIB-SEM is designed for automated lab integration and includes hardware and software interfaces to automate materials handling systems (AMHS) and manufacturing execution systems (MES).

• Metrios 6S (S)TEM:

Specifically designed for semiconductor critical dimension (CD) reference metrology and characterisation, this instrument facilitates data management in a fully automated workflow and has interfaces to connect to AMHS and MES.

This significantly reduces the operator burden, which has limited high-productivity results in the past.

Thermo Fisher's commitment to innovation and excellence in semiconductor metrology is evident in their development of the Vulcan Automated Lab.

By integrating advanced automation and AI capabilities, Thermo Fisher is driving semiconductor innovation and advancement, enabling manufacturers to meet the increasing demands of the industry with greater efficiency and precision.

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